Course Description
Microelectronic transducer principles, classification, fabrication and application areas. Silicon Micromachining and its application to integrated microelectronic sensors and actuators. CMOS compatible micromachining, static, dynamic and kinematic microactuator fabrication. Integrated transducer system design and applications. Students will be required to complete a micromachining project in the microfabrication lab at ENSC.
Prerequisites
Successful completion of <a href=/undergrad/courses/ENSC340.html>ENSC 340-4</a>, <a href=/undergrad/courses/ENSC453.html>ENSC 453-4</a>, <a href=/undergrad/courses/ENSC495.html>ENSC 495-4</a> or permission of the instructor is required for students wishing to take this course.