ENSC495/851: Introduction to Microelectronic Fabrication
Labs Downloads 2016-1 (Spring)

All course outlines, notes, lab notes, and related files can be downloaded in PDF form
Downloads are restricted to ENSC 495/851 course students.


Lab Notes & Runsheets
Lab Info
File Information
File Date
Size (K)
General lab General Lab Intro Jan 18, 2012
26K
Lab 1 Overview Lab 1 Notes & writeup
Feb 23, 2013
1,849K
Lab General Overall Lab Runsheet Jan. 30, 2001
7.1K
Lab Week 2 &
Lab Week 3
RCA PreOx Runsheet
Wet Ox Runsheet
Jan 13, 2004
7.3K
68K
Lab Week 4 &
Lab Week 5
Photlith Runsheet
Oxide etch Runsheet
PhotoRework Runsheet
Jan. 30, 2001
10.2K
7.4K
11.2K
Lab Week 6 RCA PreDiff Runsheet
Boron Diff Runsheet
Low Temp Ox Runsheet
Feb 13, 2001
7.5K
7.5K
7.0K
Lab Week 7 Boron Ox Etch Runsheet
RCA PreDrive Runsheet
Boron DriveIn Ox Runsheet
Feb 20, 2001
Feb. 17, 2003
7.3K
7.5K
7.7K
Lab 2 Overview Lab 2 Notes Apr. 11, 2012
2,364K
Lab Week 8 Photlith Runsheet
Oxide etch Runsheet
PhotoRework Runsheet
Mar. 5, 2013
Jan. 9, 2009
10.2K
7.4K
11.2K
Lab Week 9 RCA PreDiff Runsheet
Phosphorus Diff Runsheet
Phosphorus Drv Runsheet
Mar 6, 2001
Feb. 17, 2003
7.5K
7.7K
7.0K
Lab Week 10 Photlith Runsheet
Oxide etch Runsheet
PhotoRework Runsheet
RCA PreAl Runsheet
Al Sputter Runsheet
Mar 8, 2001
10.2K
7.4K
11.2K
7.5K
7.1K
Lab Week 11 Photlith Runsheet
Al Etch Runsheet
Al Anneal Runsheet
PhotoRework Runsheet
Mar 8, 2001
10.2K
7.1K
6.7I
11.2K
Lab device testing
Lab Device Testing description
Mar. 25, 2015
1,142K
Tektronix Curve Tracer manuals
576 user manual
576 full manual
Apr. 11, 2012
4,239K
29,231K
Guide to Errors and Propagation
Practical_Guide_to Errors_and Error_Propagation
Sept. 27, 2005
1,226K
Microscope scale factors
Scales for Cleanroom Motic Microscope camera images
Mar. 20, 2015
23K


Lab Picture Downloads


Lab Info
File Information
File Date
Size (K)
Lab1 pictures to Mar18-2016
Picture Lab 1 rar file
Mar. 20, 2016
36,243K
Lab2 pictures Mar. 18-Apr7-2016
Picture Lab 2 rar file
Apr. 20, 2016
9,761K
Profileometry files
Profileometer 2016
Apr. 20, 2016
2,293K

Page maintained by: Prof. Glenn Chapman
Last updated Apr. 21, 2016