MEMS and MOEMS
  • S. Precesky, M. Parameswaran, M. Weber, and M. Syrzycki, CMOS - Silicon Bonding: A Hybrid Approach for the Fabrication of Integrated Micromechanical Transducers, Fourth International Forum on ASIC and Transducer Technology ASICT'91, Louven, Belgium, pp.117-128, May 13-15, 1991.
  • M. Parameswaran, R. Chung, M. Gaitan, R.B. Johnson, M. Syrzycki, Commercial CMOS Fabricated Integrated Dynamic Thermal Scene Simulator, 1991 International Electron Devices Meeting IEDM'91, Washington, DC, pp.753-756, December 8-11, 1991.
  • G. Chapman, M. Parameswaran, and M. Syrzycki, A Wafer Scale Thermal Scene Generator, IEEE Conference on Wafer Scale Integration WSI'92, San Francisco, CA, pp.300-309, January 22-25, 1992.
  • I. Stoev, M. Syrzycki, M. Parameswaran, G. Chapman, and A. Rawicz, Process Optimization for Micromachined Silicon Non-Reverse Valve, Sixth Canadian Semiconductor Conference, Ottawa, Ontario, Aug 11-13, 1992.
  •  I.Stoev, M.Syrzycki, M.Parameswaran, G.Chapman, and A.Rawicz, Process Optimization for Micromachined Silicon Non-Reverse Valve, Canadian Journal of Physics, Vol.70, No.10-11, pp.881-885, 1992.
  • E. Czyzewska, M. Parameswaran, M. Syrzycki, Postprocessing Etch Characteristics of Mitel Chips, Micromachining Workshop, Univ. of Alberta, Edmonton, Aug. 13-15, 1994.
  • B. Ghodsian, M. Parameswaran, M. Syrzycki, Metallic Microstructures by Electroplating, Canadian Workshop on MEMS, Waterloo, 19 Feb. 1996.
  • B. Ghodsian, M. Parameswaran, M. Syrzycki and N. Tait, Fabrication of Affordable Metallic Microstructures by Electroplating and Photoresist Molds, 1996 Canadian Conference on Electrical and Computer Engineering, CCECE'96, Calgary, pp.68-71, May 26-29, 1996.
  • B. Ghodsian, M. Syrzycki, G. Gries, Microelectromechanical Probe for an Integrated Electroantennographic System, IEEE 1996 Innovative Systems In Silicon Conference, ISIS'96, Oct 9-11, 1996.
  • B. Ghodsian, J. Chen, M. Parameswaran, M. Syrzycki, Towards an Integrated Sub-Nanogram Mass Measurement System, IEEE 1996 Innovative Systems In Silicon Conference, ISIS'96, Oct. 9-11, 1996.
  • B. Ghodsian, M. Parameswaran, M. Syrzycki, Simple Technology for Fabricating Micromechanical 3D Structures Using Electroplating without Photoresist Mold, SPIE Proceedings Vol. 2879, SPIE's 1996 Symposium on Micromachining and Microfabrication, Austin, Texas, USA,  Oct 14-15, 1996.
  • B. Ghodsian, M. Parameswaran, and M. Syrzycki, Low-Cost Method for Manufactruring Field Ionization Structures, Symposium on Microelectronics R&D, Ottawa, Ontario, Jun 16-18, 1997.
  • B.Ghodsian, M.Syrzycki, A.Parameswaran, Micromachining Gas Detector Based on Self-Aligned Ionization Tips, SPIE Proc. Vol. 3514, pp.403-410, SPIE's 1998 Symposium on Micromachining and Microfabrication, Santa Clara, California, USA,  Sep 21-22, 1998.
  • B. Ghodsian, M. Parameswaran and M. Syrzycki, Gas Detector with Low-Cost Micromachined Field Ionization Tips, IEEE  Electron Devices Letters, vol. 19, no.7, p.241-243, 1998.
  • S.Bakshi, A.Haidari, A.Parameswaran, M.Syrzycki, D.Crampton, Reconfigurable Slit Mask for Multi-Object Spectroscopy, TEXPO 99, Ottawa, Jun 14, 1999.
  • K. Roberts, M. Parameswaran, M. Moore and M. Syrzycki, Bulk Micromachined Silicon Aperture for Counting Blood Cells: Fabrication and Modelling, Device and Process Technologies for MEMS and Microelectronics, MICRO/MEMS 99, Queensland, Australia, Oct 27-29, 1999.
  • B. Ghodsian, M. Parameswaran and M. Syrzycki, Low-Cost Methods for Manufacturing Field Ionization and Emission Structures with Self-Aligned Gate Electrodes, US Patent  5,989,931, Nov.23, 1999.
  • S. Bakshi, M. Parameswaran, M. Syrzycki and D. Crampton, Surface Micromachined Reconfigurable  Multi-Slit  Mask, Canadian Jour. Elect. & Comp. Engineering, Vol. 25, No. 1, pp. 9-12,  2000.
  • M. Syrzycka, M. Sjoerdsma, P. Li, M. Parameswaran, M. Syrzycki, C. Koch, R. Uthkede, Electronic Concentration of Negatively-Charged Molecules on a Fabricated Biochip, Analytica Chimica Acta, vol. 484, pp. 1-14, 2003.



    For author's copy of the publication, send an e-mail to marek@cs.sfu.ca.