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Microfluidics, microassembly, biomedical microdevices and instrumentation, high-aspect ratio microfabrication techniques, micro total analysis systems. Development of a toolkit of interconnect structures and microassembly methodologies for combining micro-electronic, -fluidic, -optical, and -mechanical components into microinstruments for biomedical and other applications, including cell research, disease detection, drug delivery, and planetary physics experiments.