ENSC495/851: Introduction to
Microelectronic Fabrication
SFU Eng. Science Course 2016-1 (Spring)
(ENSC 495, 4 credits, split as 2-0-4: ENSC 851,
3 credits, 2-0-1)
Description
This course gives students a hands-on introduction to Integrated
Circuit Fabrication. The lectures introduce the theoretical
background and application of each major IC fabrication processes:
eg. oxidation, doping, depositions, photolithography and etching.
Process simulation tools will be used throughout to help
understand each process. In parallel the laboratory gives practical
experience of each process as part of an IC the students build from
the bare silicon to final working devices
.
Instructors
Professor: Glenn Chapman, Rm ASB
8831, Phone: 778-782-3814, email: glennc@cs.sfu.ca
Laboratory Engineer:
Slide 3
Andras Szigeti, aszigeti@sfu.ca Rm ASB 8832
TA's: Amin Rasouli, mrasouli@sfu.ca
Prerequisite
The prerequisites are the students need are an understanding of
basic transistor and diode operation. ENSC 222/ENSC 225 (Electronic
Design I) or equivalent. However the class is in high demand
and entrance is by application only. Please go the ensc
website for the application instructions and forms, for undergrads,
or grad
students, which must be turned into the ENSC undergrad
assistant. Final set applications will end by Jan. 8th.
Lecture Schedule
Lecture Tuesday, 17:30-19:20, SCEB1012
Labs: LA02 Wed. 17:30-21:20, ASB 8823
LA01 Thur.
14:30-18:20, ASB 8823 (depending on class size)
Page maintained by: Prof.
Glenn
Chapman
Last updated Mar. 9, 2016