Glenn H. Chapman
Assoc. Prof. Eng. Science
Dr. Glenn Chapman's main area of research is in Microelectronics, including Wafer Scale Integration, defect avoidance techniques, laser micromachining, micromachining, laser processing of materials, microfabrication, VLSI design, computer aided engineering, embedded microprocessor systems, anti-theft technology, and device physics.
Current Research Projects
- Laser applications for IC redundancy in building Wafer Scale Integration -
Large Area Restructurable Silicon Systems
- Laser applications in micromachining
- Using micromachining techniques to create new sensors/actuators
- Large area applications in both Wafer Scale Integration circuits and
transducer arrays
- Large area/Wafer Scale Integration Field Programmable Gate Arrays & Custom
Computers
- Laser applications to semiconductor processing
- Microfabrication technology
- Orbital Microfabrication
- Laser applications to medical measurements for diagnosis and surgical
correction
- Embedded microprocessor systems
- Computer Anti-Theft technology
Links To Other Descriptions of Research
Research Equipment
Laser Table equipment consists of a focused 5 watt argon ion laser beam (488/514 nm wavelength) with spot sizes down to 1 micron full width half
maximum. An electro-optic shutter controls the beam pulse duration from
single 2 microsecond pulse through to continuous exposure and multiple pulses. IC's are positioned below the beam using a laser interferometry controlled
XY table with position accuracy of 0.1 micrometers over a 25x25 cm
area. The table can move to locations and stabilize in less than 0.1 sec for distances less than 1 mm, and about 1 second for the full
25 cm. A TV camera image of the laser position area is displayed
in the control system computer using a real time frame grabber on the TV microscope image. Digitally stored images can be taken of the
cut points to verify the location of operations. IC's can be worked
on in any of the following formats: chips or wafers, 24 or 40 pin DIPS, 64 pin-grid arrays. The combined laser, shutter and positioning system operates
under a integrated MSWindows control system developed here at SFU. The system
allows automatic moving to position, adjustment of the pulse parameters
(duration, number of pulses, shape, etc.) and firing of the laser pulse. Scripts of control commands enable the table to move through a sequence of
operations without needing any user input.
Microfabriction and micromachining research work at SFU's Microfabriction Laboratory including oxidation/doping furnaces, film RF sputter deposition
system, photolithography, wet etching stations and inspection/measurement equipment.
Several 486 and Pentium class PC's for personal use of my Graduates students. Design work using SFU's VLSI Design facility with 2 Spark 10, 2 Spark 20 and
one IPX file server. IC design with Cadence and Kic computer aided design tools. Analysis with Hspice circuit simulation, Ansys fine element program
and Ssupreme4 processing simulation. Access to Canadian Microelectronic Corp.'s 3 micron, 1.2 micron, 0.8 micron and 0.5 mircon mulitproject wafer
design submissions.
Recent Publications
Funding Support
Funding for this research comes from NSERC Operating grants, B.C. Advanced
Systems Institute Senior Fellowship, and Centre for System Studies Strategic
Studies grants, plus industrial research grants.
Industrial Partnerships
Industrial cooperation with the following firms in the area of
microfabrication and micromachining:
- Kinetic Sciences Inc., Vancouver, B.C.
Successfully completed STEAR Phase I
study on Advanced Tactile and Proximity Sensors for the Canadian Space Agency
(CSA). Phase II project underway for advanced proximity/vision sensor invented
during Phase I which is under patent application by the CSA.
- Tantus Electronics and TRIUMF, Vancouver, B.C., with Dr. Martin Salomon.
Development and prototyping of micro electrodes for Gas Strip Detectors.
First generation microelectrodes have produced successfully working detectors,
second/third generation under test. Cooperating with local companies for
application in X-ray inspection systems.
- Cooperation with Boeing Aircraft on the advantages of space manufacturing of
microchips.
- PMC-Serria, and Canadian Microelectronics Corporation.
Development of laser
microsurgery integrated circuit repair techniques, and their application in
both chip repair or defect evaluation.
Related Courses
- ENSC 461: Special Topics in Photonics and Laser Applications in Engineering
- ENSC 351: Real Time Systems
- ENSC 495:Special Project Lab in Introduction to Microelectronic Fabrication
