| File
Information |
Status |
File Date |
Size (K) |
| Course Outline Spring
2016 |
Current PDF notes |
Jan. 5, 2016 |
28K |
Week 1 (Lesson 1) -
microfabrication, clean rooms and Si crystals, wafers
(revised)
pg 31 revised
|
New
PDF notes |
Feb. 11, 2016 |
10,579K |
Week 2 (Lesson 2)
silicon wafer growth & oxidation process
revised pg 44
|
New
PDF notes |
Mar. 29, 2016 |
9,662K |
| Week 3 Notes (Lesson 3)
Photolithography: resists, coating and mask aligners |
Current PDF notes |
Jan. 19, 2016 |
3,663K |
| Week 4 Notes (Lesson
4): Resist exposure/development and advance lithography
|
Current PDF notes |
Jan. 26, 2016 |
5,003K |
Week 5 Notes (Lesson
5): Etching intro - wet etching of oxide
|
Current PDF notes
|
Feb. 2, 2016 |
4,858K |
Week 6 Notes (Lesson
6): Diffusion and doping (revised)
|
Current PDF notes
|
Feb. 3, 2016 |
8,924K
|
Week 7 Notes (Lesson
7): Ion implantation, Etching Si, Al (revised)
pg 3 revised
|
New
PDF notes |
Mar. 26, 2016
|
6,148K |
Week 8 Notes (Lesson
8): Vacuum Systems & Evaporation deposition
|
New
PDF notes |
Mar. 1, 2016 |
4,744K |
Week 9 Notes (Lesson
9): Sputter deposition, metal and intermetal layers
|
Current PDF notes |
Mar. 15, 2016 |
7,148K |
Week 10 Notes (Lesson
10): Chemical Vapour Deposition (CVD)
|
New
PDF notes |
Mar. 22, 2016 |
4,154K |
| Week 11 Notes (Lesson
11): CVD epitaxy and Plasma etching |
New
PDF notes |
Mar. 29, 2016 |
6,277K |
| Week 12 Notes (Lesson
12): RIE etching, Packaging and Testing |
New
PDF notes |
Mar. 29, 2016 |
10,356K |
| Week 13 Notes (Lesson
13): Process Integration & Simulation |
New
PDF notes |
Apr. 5, 2016 |
4,300K |